Capability: 
Surface Treatment
Make/Model: 
AJA
Purpose: 
Sputtering of metal and dielectric thin films
Notes: 

Download Standard Operating Procedures (.pdf)

  • Sputter down configuration
  • Load lock
  • DC and RF power supplies
  • Substrate heating and bias

Hourly Rates: 
OSU / Non-OSU: $47 / $94
Training: 

See trainer and contact information on the ATAMI Capabilities Training Staff page.