Applications

  • Semiconductor material resistivity measurements - bulk, sheet,...

 

ATAMI Links

Specifications and Features

  • Jandel 4-point probe with RM3000 test unit.
  • Up to 250mm wafer.  Also samples of varying height.
  • Tungsten-carbide probe tips, 1mm probe spacing, 100 micron needle radius.
  • RM3000 measurement range: 1 mohm/square to 500 Mohm/square.  
  • RM3000 auto-ranging to set optimum current.
  • RM3300 current range 10nA – 99.99mA.

 

Documents and Links